Nitrogen (N2) Compatible Products

Series ZF are air suction filters that prevent trouble in vacuum equipment caused by contaminants in the air. They are light weight and compact. ZF filter elements are easily replaced without tools.

The SFB200 series clean gas strainer can serve as a prefilter for clean gas filters or a standalone unit when filtration is less critical. These units feature replaceable elements, and both the housing and element are 316 stainless steel. With a 120 micron filtration and 400 lpm flow rating, the SFB is an excellent choice for less critical clean air or nitrogen applications.

The SFD series clean air filter utilizes hollow fiber membrane elements to provide 0.01 micron filtration at 99.99% efficiency. It is available in both disposable and serviceable types in resin, aluminum construction. It is designed for use with both compressed air and nitrogen.

Clean Air Module series LLB, available in a standard or high flow type, was designed to easily obtain clean air. The space-saving module design reduces piping man-hours. The series is assembled and double-packed in a clean room environment. Available in 24 variations the LLB offers a nominal filtration rating of 0.01 μm. Parts in contact with fluid are grease-free and silicon-free. Options include digital flow switch, regulator, ON/OFF valve, and restrictor.

Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.

The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.

SMC offers a variety of pressure gauges including general purpose, oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch. Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge. Panel mounting is possible.

Compact and lightweight, the KQB2 one-touch fitting uses electroless nickel plated brass components as standard specification. Its maximum operating temperature is 150° C. KQB2 fittings can be used with fluid, and in environments having a large temperature change. Configuration variations have been improved to 17 models. Applicable tube sizes are Ø3.2 to Ø16 and 1/8" to 1/2". Series KQB2 is available with M, R, Rc, UNF, NPT or G connection threads.

Series KP are one-touch fittings for clean room blow-off systems and drive air systems. The KP series is completely oil free and liquid-contact areas are non-metallic. Parts are cleaned, assembled and double packaged in a clean room. Resin parts for one-touch series KPQ/KPG (for drive system air piping) are polypropylene.

Series TL high purity fluoropolymer tubing is available as standard in metric sizes of 10m or 20m rolls. The TL series has outstanding corrosion resistance, compatible with chemicals such as acids, bases and ultrapure water.

PSE560 and 564 are remote pressure sensors with an analog V or mA signal output. PSE56* sensors measure pressure of any liquid or gas non-corrosive to 316L stainless steel. 560 is for a standard pneumatic system's pressure range, while the 564 model is for low pressure. An accuracy of ±1% of the full scale rated pressure range is suitable for general purpose applications. Includes a fixed cable with field wired connector option. PSE560 and PSE564 are UL/CSA, CE and RoHS compliant, with IP65 enclosure ratings.

The VX2 for air is available with resin and aluminum body. Resin body is offered with one touch fitting to reduce installation time. Three body sizes are available, with port size ranges from 1/8 to 1/2 inch (6 to 12mm with resin body). NBR seal is used as standard and FKM or EPDM is optional. Flow rate ranges from Cv of 0.23 to 2.21.

SMC's updated VXD series for air is a pilot operated, 2 port solenoid valve. The renewed VXD is not only smaller, but uses less power compared to the previous version. Available in aluminum, resin, brass and stainless steel. The VXD series also offers low concentration ozone resistant and oil free options. Flow rate ranges from Cv of 1.9 to 9.5 for the threaded version.

The VQ20/30 series is a pilot operated, two port multi-media valve. The series is compact and lightweight with a large flow capacity. The VQ20/30's long life, high speed coil (up to 20 million cycles at 100cps for pneumatic use) along with its all plastic construction make it an excellent choice for those who want high performance at a lower cost.

High purity chemical valves, series LVC with integral fittings eliminate the possibility of residual liquid in pipe threads. In addition, the body has been designed for smooth flow with minimal internal dead space. Special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.

LVH series air operated high purity valves are corrosion resistant against acid, alkali and ultra pure water, making the LVH valve the perfect answer to overcome the harsh environments often encountered in wet process applications. Series LVH is a manually operated valve, available in a threaded or integral fitting type.

The LVD series are space saving, compact type, air operated high purity valves, which are designed to overcome the harsh environments often encountered in wet process applications. Its resin fluid path, makes it the perfect choice when working with acids, alkalis and ultra pure water. The LVD valves have PFA body materials and integral fittings (Hyper Fitting series LQ1 and clean series KP).

Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa(absolute). Face Seal and compression fitting options offer extremely low levels of internal and external leakage. Two DC and eight AC voltage options are available, paired with multiple electrical entry styles.

Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).

Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.

• Body material: 316SS
• Max operating pressure psig (MPa): 125 (0.9)
• Connections: compression, Rc, R, NPT
• Normally closed

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

The AP 74 and AP 74B are safety devices to detect excess flow in UHP gas delivery systems. The switches are available with a wide variety of trip points and configurations. An online selection guide makes choosing the proper switch for a given gas, pressure and maximum flow rate as simple as a few key strokes.

SMC has designed a variety of products to be used in secondary battery manufacturing applications. Secondary batteries are rechargeable batteries, sometimes referred to as storage batteries or secondary cells, often used in the electric vehicle (EV) industry. These batteries differ from primary batteries as they are able to be recharged. This product line includes actuators, valves, airline equipment, etc., designed using materials compatible with secondary battery applications, as well as products to be used in low dew point environments.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.