High Vacuum
Unveiling precision with SMC’s high vacuum technology
Indulge in the future of industrial automation with SMC’s high vacuum technology. Our revolutionary high vacuum solutions help you to elevate your efficiency, redefine precision, and unleash a new era of productivity.
This comprehensive guide navigates through SMC's high vacuum product range, explores various applications, and provides valuable insights on selecting the ideal high vacuum components for your specific requirements.
XVD2, High Vacuum Valve, Smooth Vent
Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).
- High vacuum valve, smooth vent
- Operating pressure: 1x10 -6 (abs) to 0.2 MPa (G)
- Operating fluid: nitrogen, air
- Valve style: normally closed
- Material: SUS316L, SUS304, FKM
Angle and In-line Valves
High vacuum angle and in-line valves are for use in industrial applications employing high vacuum and process gases. Common industries that may use these angle valves include semiconductor, solar and other electonics production, as well as food and pharmaceutical manufacturing.
Slit Valves
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
High Vacuum Solenoid Valve
Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6Pa(absolute). Face Seal and compression fitting options offer extremely low levels of internal and external leakage. Two DC and eight AC voltage options are available, paired with multiple electrical entry styles.