- SMC Home
- Products
- Process Gas Equipment
- Check Valve-Vacuum Generator-Flow Switch
Check Valve/Vacuum Generator/Flow Switch
High purity (UHP) check valves/vacuum generators/flow switches are used for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
Process Gas Check Valve
The AP64 is an all welded and springless check valve. The unique ultraclean design has only one moving part and O-ring. The check valve provides reverse flow protection for N2 purge gas introduction and other applications.
Vacuum Generator
There are four vacuum generator models to choose from - two simple vacuum generators, AP 7 and AP70, and two modules, AP71 and AP72, which include vacuum generator, N2 inlet shut off valve and N2 inlet check valve. The modules provide a compact and cost effective solution for vacuum generator installations. The individual vacuum generators provide a variety of configurations. The devices are designed for use in gas delivery systems to improve efficiency when venting for purging.
Flow Switch
The AP 74 and AP 74B are safety devices to detect excess flow in UHP gas delivery systems. The switches are available with a wide variety of trip points and configurations. An online selection guide makes choosing the proper switch for a given gas, pressure and maximum flow rate as simple as a few key strokes.
Product & CAD Models
- Actuators
- Directional Control Valves
- Airline Equipment
- Air Dryers Main Line Filters
- Connectors
- Vacuum Products
- Industrial Communication
- Sensors Switches Controllers
- Fluid Process
- Static Control
- Electric Actuators
- Chillers
- Process Gas Equipment
- High Vacuum
- Chemical Handling Equipment
- Cobot Gripping Solutions
- Secondary Battery