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Slit Valves
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
XGTP, Parallel Seal Slit Valve for High Vacuum
Series XGTP slit valve functions as a portal between chambers of semiconductor equipment. Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers. The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate. Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.
- Window sized for 300mm wafers
- L-motion structure
- End lock holds gate opened or closed during emergency stop
- Insert or cassette type (standard, half MESK) valves
- FKM or Kalrez® 4079 gate seal materials
- Optional position sensor and connectors
XGT*, High Vacuum Slit Valve
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, or between the transfer chamber and the process chamber in semiconductor manufacturing equipment or other equipment.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
- Easier maintenance
- Easy replacement of bellows
- Gate can be replaced from above (Made to order)
- Safety measures
- A mechanical end lock mechanism has been adopted
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