High Vacuum – Slit Valves
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
XGT*, High Vacuum Slit Valve
Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
- Easier maintenance
- Easy replacement of bellows
- Gate can be replaced from above (Made to order)
- Safety measures
- A mechanical end lock mechanism has been adopted