Industries Powered by SMC

SF series clean air filters are available as cartridge type or disposable type models.  The filtration level is 0.01 micron (filtering efficiency of 99.99%) on units with membrane elements.  The SFB20, with a sintered metallic element, has a nominal filtration of 120 micron.  The SF series can be used under different environments with chemical resistant and heat resistant materials (refer to catalog specifications for each series).

Clean regulator series SRH is a contamination controlled stainless steel regulator designed to minimize residual fluid. Design includes an intake/exhaust port in the diaphragm compartment, which facilitates flow. SRH has outstanding corrosion resistance. All metal parts in contact with fluid use stainless steel SUS316.

Series PF3A digital flow switch provides continuous quantitative values as well as switched digital outputs when set flow levels are measured. The PF3A is suitable for applications requiring a metered quantity of air, such as for supply confirmation, filling accumulation, or fixed supply consumption. The oversized PF3A display has 2 screens, with main screen flow values in red or green, while the sub screen settings are shown in orange. The display can be rotated in 90 degree increments, thereby offering better visibility during operation. The thermal sensor is protected in a bypass flow path to reduce contact with moisture and contaminants, avoiding accuracy deterioration and damage.  The PF3A has an IP65 ingress protection rating and is both RoHS and CE compliant.

Smooth vent valve series XVD2 is a normally closed type valve with connection types VCR (male & female) and Swagelok. Port size for the main supply is 1/4" and orifice is 3mm. Materials consist of SUS316L (body & bellows), SUS304 (diaphragm) and FKM (valve and external seal).

HRZ recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature ±0.1°C. All models offer compatibility with R404A and R134a refrigerants. 4 cooling capacities are available. This model is compatible with fluorinated coolants including Fluorinert™ and GALDEN®.

Solenoid control valves are good for general purpose use.  Direct acting poppet valves available in normally closed and normally open varieties.  Available in a varietey of materials including resin, aluminum, brass and stainless  steel.

Liquid flow sensors with buttons and a display to set and read values from an operator's position.

ISE20C is a digital pressure sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the ISE20, the ISE20C adds a 2nd switch output, as well as analog voltage or current output.  The ISE20CH offers a 2 MPa pressure range.  The 3-screen, 3-color display shows the instantaneous reading in red or green, and the setting label and its numerical value in orange.  The switch output responds within 1.5ms once the set pressure value is reached.  ISE20C(H) is UL/CSA, CE and RoHS compliant, with an IP65 enclosure rating.

Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.

ZSE20C(F) is a digital vacuum sensor offering compatibility with both compressed air and non-corrosive liquids.  Compared to the ZSE20, ZSE20C(F) adds a 2nd switch output, as well as analog voltage or current output.  The 3-screen, 3-color display shows the instantaneous reading in red or green, and the setting label and its numerical value in orange.  The switch output responds within 1.5ms once the set pressure value is reached.  Both vacuum and compound pressure ranges are offered.  ZSE20C(F) is UL/CSA, CE and RoHS compliant, with an IP65 rating.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

SMC high purity Hyperflare™ Fitting series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.

Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.

Series PA is a double acting, compact, large capacity diaphragm pump suitable for transfer and recovery of a wide variety of fluids. The PA series is available in 3 types; automatically operated, air operated or automatically operated with a built-in pulsation attenuator.