Chemical Handling Products
High Purity Products for Chemical Handling Application
In response to the latest demands in process control, SMC has incorporated leading edge product innovations and engineering excellence to develop a high purity product suite. These high purity solutions strive to continually advance the technology of minimizing contaminates. Achieving success as a quality leader by minimizing both particulate and chemical contamination to levels compatible with the most demanding requirements.
SMC High Purity provides:
- Excellent heat resistance
- Clean specifications
- Outstanding corrosion resistance
- Numerous variations
- Compatibility with fluid temperatures exceeding 400°F
Note for overseas shipments: Export of these products are regulated by the United States Government. Please refer to http://www.bis.doc.gov/ for Export Regulation guidelines.
*NOTE: A number of LQ3 fitting configurations are available, even beyond what is noted within the CAD access tool (examples are noted below).
Application examples: bulk chemical distribution systems, hot chemical wet bench, chemical mechanical planarization
Additional Info
HyperFlare Fittings & Fluoropolymer Tubing
SMC high purity Hyperflare™ Fitting series LQ* responds to the latest demands in process control. From parts cleaning to assembly and packaging, all processes are controlled for cleanliness, and the use of new PFA virtually eliminates particle generation and TOC (total organic carbon) allowing confident use for the most demanding applications. If chemistries or flow requirements are changed during process, our face seal design allows for quick change of tubing, and/or tube diameters, using the same fitting body.
Fluoropolymer Valves
Series LVQ is a 2 port chemical valve with a non-metallic exterior. A high density PVDF housing offers increased chemical resistance and the special diaphragm construction insures gentle opening and closing preventing the formation of micro-bubbles. The LVQ guide ring eliminates lateral motion of the poppet, which reduces internal leakage.
Liquid Flow Measurement and Flow Control
SMC's new InfiniFlow™ ultrasonic flow sensing technology incorporates a cutting-edge contrapropagating cross-correlation measurement method. This technology is up to 20 times faster than the industry standard "sing-around" method. In addition, the cross-correlation method is much more efficient in data collection and processing, even under adverse conditions with micro-bubbles. The system is an "All-SMC" fully integrated technology. By a simple change on the Windows™ utility screen, you can switch from stand-alone sensor mode to closed-loop mode, and with the addition of the LTV20 hybrid regulator, you will be controlling liquid flow with superior accuracy and repeatability. This is accomplished using the same compact controller for either mode, and there is no "hand-shaking" with a separate PID controller.