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Air Flow Controllers
Air flow controllers combine a valve with a flow sensor for confirmation. Control electronics receive an input signal that corresponds to a target flow rate. Air flow is measured, then the valve is opened or closed until the value matches the target rate. Several methods can be used to actuate the valve, depending on the product’s design requirements. Devices in this category may include an integrated or remote display, IO-Link protocol, M12 or D-sub connector, switch output and a range of flow rates. Applications include semiconductor manufacturing, welding, fabrication, painting, or food packaging.
PFCA7, Air Flow Controller, 0.1-100 lpm
PFCA7 is a flow controller for clean, dry compressed air, N2, Ar, or CO2. The design integrates a flow sensor, valve, and control mechanism for automatic adjustment in response to an analog voltage or current signal. Control is linear and stepless within the rated flow ranges offered. Features include 10 port options, a dot-matrix LCD color display that rotates 90°, raised rubber setting buttons and an M12 cable connector. The main screen will display current flow rate. The sub screens can display the command value, accumulated flow, peak and bottom values, or a user-given line name. IO-Link and analog switch outputs are offered. The controller offers an IP40 rating for dusty environments and meets CE and RoHS certifications.
- >Flow ranges: 0.1-100 lpm (4 sizes)
- Operating pressure: ≤ 250, 300 or 350 kPa (size specific)
- Display units: lpm or cfm ( instantaneous flow), L or ft3 (accumulative flow)
- Port size: 1/8 or 1/4 Rc, NPT, or G; 4, 6, or 8mm tubing; ¼” tubing
- Power supply: 24 VDC
- I/O signals: 1-5 VDC, 0-10 VDC, 4-20mA, IO-Link
- Accuracy: ±3% F.S.
PFCQ, Flow Controller for Air, 9-300 lpm
PFCQ is a flow controller for clean, dry compressed air or nitrogen that can adjust the flow automatically in response to an analog voltage or current signal. The device combines a flow body, flow sensor, linear motor, valve and electronics to achieve the desired flow rate. Control is linear within the rated flow range. The PFCQ is grease- and oil-free with no copper or aluminum in the fluid flow path, to be suitable for FOUP and EFEM semiconductor manufacturing equipment. An optional PFG flow monitor can be connected for displaying the flow rate and switch output. Power and input signals connect via a D-sub connector. CE, UKCA, and RoHS certified.
- Flow range: 9 to 300 lpm
- Operating differential pressure range: 0.05 to 0.5 MPa
- Port size: 1/2 Rc
- Power supply: 24 VDC
- I/O signal: 1-5 VDC or 4-20 mA
- Accuracy: ±3% F.S.
- Settling time: ≤ 0.5 seconds
IN502, Air Flow Controller, 50-2000 lpm
IN502 flow controllers for clean, dry compressed air adjust the flow rate automatically in response to an analog voltage or current signal. Control is linear and stepless within the rated flow ranges offered. When power is off, the controller can either stop flow or keep the flow rate unchanged depending on model selection. Features include 1/2 metric ports, a 3-screen 3-color display, raised rubber setting buttons and an M12 cable connector. The main screen will display current flow rate. The sub screens can display the command value, outlet pressure, min and max values, or a user-given line name. IO-Link and analog switch outputs are offered. Fluid temperature is available via IO-Link. The controller offers an IP65 rating for dusty or wet environments. Mounting brackets are available separately.
- Flow ranges: 50-500 lpm, 100-1000 lpm, and 200-2000 lpm
- Operating pressure: ≤ 1 MPa
- Display units: lpm, cfm (flow), kPa, MPa, kgf/cm², bar, psi (pressure)
- Port size: 1/2 Rc
- Power supply: 24 VDC
- I/O signals: 1-5 VDC, 0-10 VDC, 4-20mA, IO-Link
- Accuracy: ±5% F.S.
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