Low GWP Chillers
The US, California, Canada and EU have implemented regulations to restrict refrigerants with high Global Warming Potential (GWP). Regulation effective dates vary, but in response to them SMC is introducing chillers with lower GWP refrigerants, either R454C (GWP 146) or CO2 (GWP 1) which are dramatically below new thresholds. These new chillers are offered in several categories and are designed to match performance, dimensions, port size and layout of legacy designs.

HRSF, Medium Capacity, General Purpose Chiller
HRSF medium capacity chillers offer cooling capacities of 1.3~5.9 kW. Coolant and refrigeration circuits are included in a compact package. The refrigeration circuit can be air or water cooled. Air cooled models use a single fan which operates at 68 dB(A) or less. Water cooled models can connect to facility water. Set temperatures are PID controlled, while the system is monitored for multiple alarms. Additional features include a heating function, serial communication, and a range of optional accessories.
- Cooling capacities, kW: 1.3, 1.9, 2.4, 3,2, or 5.9 (60Hz)
- Temperature range setting: 5~40°C
- Temperature stability: ±0.1°C
- Power supply requirement: single-phase 200~230 VAC (50/60Hz)
- Refrigerant: R454C (GWP 146) (Not available for air transport)
- Circulating fluid: Tap or de-ionized water, or 15% glycol aqueous solution

HRRF, Rack Mounted Thermo Chiller, Low GWP Refrigerant
The HRRF is a temperature control device mountable in a 19-inch rack. Rack mounting recovers desktop or floor space, permitting stacking of related devices and mobility, depending on the rack style. Recirculating fluid removes heat from the process source, which is then removed from the fluid by an air or water cooled refrigeration circuit. Air cooling employs an internal fan, while water cooling requires facility cooling water. Coolant temperature stability is ±0.1°C within a set temperature range of 5 to 35°C. This device is self-contained with coolant and refrigerant circuits, fan or water cooled heat exchanger, electronic controls, pump, tank and power supply.
- Refrigerant: R454C (GWP 146) (Not available for air transport)
- Fluid fill, drain port, and filter access on the front
- RS-232C / RS-485 Communication functions
- Cooling/Heating capacities (W): 1200/500, 1800/500
- Temperature stability: ±0.1°C
- Power supply requirement: 200~230 VAC, 50/60Hz
- Circulating Fluid: water or 15% ethylene glycol
- Standards: UL (C-ETL-US), CE, UKCA, RoHS

HRSF, Large Capacity, Air Cooled, General Purpose Chiller
HRSF large capacity chillers offer cooling capacities of 15.7 and 20.5 kW. Coolant and refrigeration circuits are included in a compact package. The refrigeration circuit is air cooled by a single large fan, with a low sound level of 68 dB(A). Set temperatures are PID controlled, while the system is monitored for multiple alarms. Additional features include a heating function, serial communication, and IPX4 ingress rating for outdoor installation.
- Cooling capacities: 15.7 kW, 20.5 kW (60Hz)
- Temperature range setting: 5~35°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3ph 380~415 VAC (50Hz), 3ph 380~480 VAC (60Hz)
- Waterproof specification: IPX4
- Refrigerant: R454C (GWP 146)
- Circulating fluid: Tap or deionized water, or 15~40% ethylene glycol solution

HRSF, Large Capacity, Water Cooled, General Purpose Chiller
HRSF large capacity chillers offer cooling capacities of 15.7 and 20.5 kW. Coolant and refrigeration circuits are included in a compact package. The refrigeration circuit is water cooled with a facility water connection, with a low sound level of 60 dB(A). Set temperatures are PID controlled, while the system is monitored for multiple alarms. Additional features include a heating function, serial communication, and IPX4 ingress rating for outdoor installation.
- Cooling capacities: 15.7 kW, 20.6 kW (60Hz)
- Temperature range setting: 5~35°C
- Temperature stability: ±0.1°C
- Power supply requirement: 3ph 380~415 VAC (50Hz), 3ph 380~480 VAC (60Hz)
- Waterproof specification: IPX4
- Refrigerant: R454C (GWP 146)
- Circulating fluid: Tap or deionized water, or 15% ethylene glycol solution

HRZF010, SEMI Standard Double Inverter Chiller, R454C Refrigerant
HRZF010 is a water-cooled recirculating chiller for high technology sectors which employs R454C as a refrigerant. R454C has a GWP of 148, complying with current and future US and EU regulations of fluorinated greenhouse gases by lowering its environmental impact. DC inverters on the compressor and pump save operating energy. Front panel includes ventilation intake, emergency shutoff switch, LCD operation panel, and 30A breaker with handle. Rear panel includes water and circulating fluid connections, drain and fluid fill ports, power connections and a ventilation exhaust fan. Casters with brakes allow easy relocation as necessary.
- Cooling capacity: 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol
- Temperature range setting: -20 to 90°C (see catalog for conditions)
- Temperature stability: ±0.1°C
- Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz)
- Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47

HRZC010, SEMI Standard Double Inverter Chiller, CO2 Refrigerant
HRZC010 is a water-cooled recirculating chiller for high technology sectors which employs CO2 as a refrigerant. CO2 is the benchmark refrigerant with a GWP of 1, complying with current and future US and EU regulations with the least environmental impact. CO2 is non-toxic, non-flammable, and enables air transport of the chiller. DC inverters on the compressor and pump save operating energy. Front panel includes ventilation intake, emergency shutoff switch, LCD operation panel, and 30A breaker with handle. Rear panel includes water and circulating fluid connections, drain and fluid fill ports, power connections and a ventilation exhaust fan. Casters with brakes allow easy relocation as necessary.
- Cooling capacity: 10kW
- Circulating Fluid: Fluorinert™ or GALDEN® (fluorinated); 60% ethylene glycol
- Temperature range setting: -20 to 90°C (see catalog for conditions)
- Temperature stability: ±0.1°C (fluctuating heat load); ±0.02°C (stable heat load)
- Power supply requirement: 3-phase 200 VAC (50Hz) or 3-phase 200~208 VAC (60Hz)
- Standards: CE, UKCA, UL, RoHS, SEMI S2, S8, F47

HRLF, Air Cooled Dual Channel Chiller for Lasers, Low GWP Refrigerant
The HRLF is a temperature control device featuring two independent cooling channels in one package. This thermo chiller is designed to cool the optical head and oscillator of a laser processing system. Considerable space savings can be realized compared to a two chiller solution. All operations can be managed from a single touch panel. The heating function uses waste heat from the refrigerant discharge instead of a separate electric heater to improve efficiency and reliability. The HRL is copper free and suitable for DI water, including a DI filter and electrical conductivity control kit. Additional standard features include a 5µm particle filter, earth leakage breaker, and casters for mobility.
- Cooling capacity: CH1= 19kW (oscillator); CH2= 1kW (optical system)
- Power Supply: 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase
- Temperature set range: CH1 = 5 to 35°C, CH2 = 10 to 40°C
- Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C
- Refrigerant: R454C (meets EPA and CARB GWP 2026 requirements)
- Communication: contact/analog I/O; Serial RS-232C/RS-485; Ethernet Modbus

HRLF, Water Cooled Dual Channel Chiller for Lasers, Low GWP Refrigerant
The HRLF is a temperature control device featuring two independent cooling channels in one package. This thermo chiller is designed to cool the optical head and oscillator of a laser processing system. Considerable space savings can be realized compared to a two chiller solution. All operations can be managed from a single touch panel. The heating function uses waste heat from the refrigerant discharge instead of a separate electric heater to improve efficiency and reliability. The HRL is copper free and suitable for DI water, including a DI filter and electrical conductivity control kit. Additional standard features include a 5µm particle filter, earth leakage breaker, and casters for mobility.
- Cooling capacity: CH1= 21.5kW (oscillator); CH2= 1kW (optical system)
- Power Supply: 380-415VAC (50/60 Hz) or 460-480VAC (60 Hz), 3-phase
- Temperature set range: CH1 = 5 to 35°C, CH2 = 10 to 40°C
- Temperature stability: CH1 = ±0.1°C, CH2 = ±0.5°C
- Refrigerant: R454C (meets EPA and CARB GWP 2026 requirements)
- Communication: contact/analog I/O; Serial RS-232C/RS-485; Ethernet Modbus
Product & CAD Models
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