XLH, High Vacuum Manual Angle Valve, Bellows Seal

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

  • High vacuum angle valve
  • Type: manual, bellows seal
  • Flange size: 16 ~ 50
  • Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
  • Auto switches not available
XLH, High Vacuum Manual Angle Valve, Bellows Seal
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Select values from the drop down lists or make appropriate selections to configure the part number.
Flange Size Configuration Status
Heater Configuration Status
Non-standard Indicator Configuration Status
Body Surface Treatment Configuration Status
Seal Material Configuration Status
Seal Replacement Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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