XL
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLD, Aluminum High Vacuum Angle Valve, Air Operated
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Light weight and compact
- Uniform baking temperature
- High fluorine resistance
- Low outgassing
- Little heavy metal contamination
XLA, Aluminum High Vacuum Angle Valve, Normally Closed/Bellows Seal
Tailored for long and narrow workpieces with adsorption surface limitations- Pad sizes: 30 x 60, 40 x 80, 55 x 110
- Non-slip special ribs
- Material: FS61 (Fluoro-based rubber)
- Pad hardness (Shore A: ±5°): 60º
- Surface operating temperature range: 0 to 200 ºC
- Adapter & buffer operating temperature range: 0 to 150 ºC
- Mesh filter opening: 250 μm
- Options: male and female thread and square vertical vacuum inlet.
- Buffer stroke: 10, 30, 50 mm.
XLAV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
- High corrosion resistance to fluorine gas
- Minimal outgassing
- Minimal contamination from heavy metals
- Optional heaters
- Optional position sensors
- Optional oxalic acid anodizing for internals
XLDV, Aluminum High Vacuum Angle Valves, Air Operated w/Solenoid Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Light weight and compact
- Uniform baking temperature
- High fluorine resistance
- Low outgassing
- Little heavy metal contamination
XLS, High Vacuum Angle Valve, Electromagnetic Type, Bellows Balance
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Particulates are reduced because there are no sliding metal parts
- Pressure balance mechanism allows unrestricted exhaust direction
- Can be used in portable equipment since air for drive is not required
- A control power supply circuit for solenoid valve drive has been made standard
XLG, Aluminum High Vacuum Angle Valve, Double Acting, O-ring Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Air pressure applied to pilot port shifts piston-coupled valve
- Numerous maintenance parts available to extend useful life of valve
- Standard FKM seals, plus 8 additional seal compound options
- Auto switches mountable from 4 directions
- Optional 100°C and 150°C heaters (UL compliant lead wire)
XLH, High Vacuum Manual Angle Valve, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- High vacuum angle valve
- Type: manual, bellows seal
- Flange size: 16 ~ 50
- Heater type: H1 (80°C), H2 (100°C), H3 (120°C)
- Auto switches not available
XLF, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is a normally closed, single acting high vacuum angle valve with an O-ring shaft seal. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.
XLFV, Aluminum High Vacuum Angle Valve, Normally Closed, O-ring Seal with Solenoid Valve
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Excellent thermal conductivity offers uniform temperature and decreased gas condensation inside valve
- High corrosion resistance to fluorine gas
- Minimal outgassing
- Minimal contamination from heavy metals
- Optional heaters
- Optional position sensors
- Optional oxalic acid anodizing for internals
XLC, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XL*Q, High Vacuum Angle Valve, Aluminum One-touch Connection & Release
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- One-touch connection & release, requires no tools
- Lightweight & compact
- Auto switch capable
- XLAQ: single acting, normally closed, bellows seal
- XLAQ: flange sizes are 16, 25, 40, 50
- XLDQ: 2-step control, single acting
- XLDQ: flange sizes are 40, 50
XLJ, Vacuum Angle Valve w/Release Valve
XLJ is a limited release series pairing a vacuum angle valve with a release valve. The release valve allows atmospheric pressure to enter the system between the rotary pump and vacuum valve. This prevents the undesirable reverse flow of oil through the pump. The vacuum valve is a normally closed type with a vacuum pilot and o-ring shaft seal. Two flange sizes are available with 8 voltage options. XLJ is CE marked.
- Compatible with inert gases
- Flange sizes: 25 and 40
- Operating pressure range: Atmospheric to 0.01 Pa
- Operating temperature: 5-40°C
- Voltage options: (100, 110, 200, 220, 230, 240)VAC; (12, 24)VDC