AP
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
AP3130 & 3113, Diaphragm Valve, Air Operated for High Pressure and High Flow
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed
- High pressure type: 20.7 MPa and 9 MPa
- Designed for bulk specialty gas (BSGS) delivery
- LOTO option available as an option
AP3700, Diaphragm Valve, Air Operated for High Flow
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed or normally open
- Purge ports and monoblock configurations available
AP3000, Diaphragm Valve, Air Operated, High Pressure
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed
- High pressure type: max. 3000 psig (20.7MPa)
- Options include: LOTO option and indicator switch
AP3571 & 4571, Diaphragm Valve, Air Operated, Two Step
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt.- Two step mode - metered flow and full open
- Two separate actuation ports
- Soft start valve to minimize vacuum chamber pressurization turbulence
- Metered flow adjustable
- Pneumatically actuated normally closed
- Body material: 316L SS secondary remelt
AP3200, Diaphragm Valve, Air Operated, Metal Seated
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas supply line
- Body material: 316L SS secondary remelt
- All metal wetted parts
- Pneumatically actuated normally closed
- Optional indicator switch
AP3500, Diaphragm Valve, Air Operated (Low Pressure)
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas line supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed or normally open
- LOTO option available as an option (AP3540)
- Indicator switch available as an option (AP3550)
AP4500, Diaphragm Valve, Air Operated (Low Pressure)
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
- Suitable for UHP gas line supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed or normally open
- LOTO option available as an option (AP4540)
- Indicator switch available as an option (AP4550)