AZ
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
AZ3500, Diaphragm Valve, Air Operated for Ultra High Purity
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
- Suitable for UHP gas line supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed or normally open
- Indicator switch available as an option (AZ3550 and AZ3580 only)
AZ4540, Diaphragm Valve, Air Operated
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
- Cleaned for high purity semiconductor applications
- Cleanroom assembled and Helium leaked tested
- Valve meets dimensional requirements of SEMI F36-0299, Option 1
- Compact and lightweight
AZ3000, High Pressure Type, Diaphragm Valve, Air Operated for Ultra High Purity
Series AZ3000 is a high pressure type, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
- Suitable for UHP gas line supply line
- Body material: 316L SS
- Pneumatically actuated normally closed or normally open
- High Pressure: Max 4500 psig (31 MPA)
- Indicator switch available as an option
AZ4000, High Pressure Type, Diaphragm Valve, Air Operated for Ultra High Purity
Series AZ4000 is a high pressure type, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
- Suitable for UHP gas line supply line
- Body material: 316L SS
- Pneumatically actuated normally closed or normally open
- High Pressure: Max 3000 psig (20.7 MPA)
- Indicator switch available as an option
AZ4141, Diaphragm Valve, Air Operated for Ultra High Purity
Series AZ4141 ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated and available with up to 4 ports.
- Suitable for UHP gas line supply line
- Body material: 316L SS
- Pneumatically actuated normally closed
- Available with up to 4 ports
AZ3700, Diaphragm Valve, Air Operated for Ultra High Purity
Series AZ3700 is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated and available with purge ports and monoblock configurations.
- Suitable for UHP gas line supply line
- Body material: 316L SS secondary remelt
- Pneumatically actuated normally closed or normally open
- Indicator switch available as an option
- Purge ports and monoblock configurations available
AZ3571 & AZ4571, Diaphragm Valve, Air Operated, Two Step
Series AZ3571 & AZ4571 are a Two Step, ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated.
- Two step mode - metered flow and full open
- Two separate actuation ports
- Soft start valve to minimize vacuum chamber pressurization turbulence
- Metered flow adjustable
- Pneumatically actuated normally closed
- Body material: 316L SS