SL
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.
SL5200, Single Stage Compact Regulator for Ultra High Purity
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.- For UHP gas delivery
- Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Sub-atmospheric pressure delivery option
SL5500, Single Stage Regulator for Ultra High Purity, Low Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.- For UHP gas delivery
- Flow capacity to 30 slpm
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Sub-atmospheric pressure delivery option
SL5400, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Hastelloy® internals available for corrosion resistance
- Springless design (no poppet spring in the wetted area)
- Intermediate flow
SL5800, Single Stage Regulator for Ultra High Purity, Intermediate Flow
Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.- For UHP gas delivery
- Body material: 316L SS secondary remelt
- Inlet pressure: max. 3800 psig (2.1 MPa)
- Springless design (no poppet spring in the wetted area)
- Intermediate flow