SL5200, Single Stage Compact Regulator for Ultra High Purity

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

  • For UHP gas delivery
  • Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
  • Body material: 316L SS secondary remelt
  • Hastelloy® internals available for corrosion resistance
  • Sub-atmospheric pressure delivery option
SL5200, Single Stage Compact Regulator for Ultra High Purity
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Product Options

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Select values from the drop down lists or make appropriate selections to configure the part number.
Delivery Pressure Configuration Status
Material Configuration Status
Surface Finish Configuration Status
Range Options Configuration Status
Ports Configuration Status
Connections, Inlet Configuration Status
Connections, Outlet Configuration Status
Gauge Port, Outlet Configuration Status
Pressure Gauge Unit Configuration Status
Seat Material Configuration Status
Flow Specification Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

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