HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant

HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C.  This model includes inverter control of the pump rotations for energy efficiency.  Refrigerant is R410A, compliant with current EU F-gas regulations.    This model is compatible with a 60% ethylene glycol aqueous solution for the coolant.

  • Cooling capacities: 8kW
  • Circulating Fluid: 60% ethylene glycol aqueous solution
  • Temperature range setting: -20 to 40°C
  • Temperature stability: ±0.1°C
  • Power supply requirement: 3-phase 200 VAC/50Hz or 3-phase 200~208 VAC/60Hz
  • Standards: CE, UL, RoHS, SEMI S2, S8, F47
HRZ-F, SEMI Standard Pump Inverter Chiller, for Tap or DI Water Coolant
Configuration Options
  
 
Copy Configuration Number

Product Options

Select Product Options
Select values from the drop down lists or make appropriate selections to configure the part number.
Communication Configuration Status
Options Configuration Status
Options in:
  • Gray are not compatible with other selected option value.
  • Red conflict with another selected option value.
  • Amber are not recommended.

Downloads

The part number needs to be complete in order to view/download CAD Models.

Model does not exist, please email cad@smcusa.com with the complete part number, CAD file format and version required.

CAD is not currently available for auto generation of . The file can be requested by contacting CAD@smcusa.com

CAD Downloads

Download CAD File

View CAD Models

View 3D Model

Product Catalog

Series Catalog

RoHS Certificate

Download Certificate