SMC Products at Semicon West

Series XLA are high vacuum angle valves for use in industrial applications employing high vacuum and process gases.  Common industries that may use these angle valves include semiconductor, solar and other electronics production, as well as food and pharmaceutical manufacturing.  XLA valves are single-acting, normally closed, with a bellows seal over the shaft and spring.  The vavle opens when pressure is applied at the pilot port.  The bellows assembly can be replaced, reducing maintenance costs and waste materials.  The valve body is hard anodized A6063 aluminum, with 304 stainless steel valves and bellows.  Numerous seal materials are available for a wide range of chemical compatibility.

XLG is a double acting high vacuum angle valve with an O-ring shaft seal. The XL* family shares common features with all series members. Bodies are made of aluminum for light weight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

Series XM (high vacuum angle valve) and XY (high vacuum in-line valve) feature body materials of SUS (stainless steel). The structure of the XM is the same as the XL, except the body material of the XL is aluminum. The XM series is interchangeable with the XL series. The precision cast, one piece manufacturing process of the XY series prevents imperfections due to accumulation of gas and ensures no porosity in the body.

Series XGTP slit valve functions as a portal between chambers of semiconductor equipment.  Typical positions include between the transfer chamber and load lock chamber, or transfer and process chambers.  The XGTP has been designed for easier maintenance, including easy access to replace the actuator bellows or the gate.  Low particle generation and a 3 million cycle sevice life support high productivity of the semiconductor tools.

With no external leakage, the CY series can be used in many diverse environments. Magnetically coupled cylinders have a wide range of applications, and save mounting space. Loads and moments are possible through the use of integrated guides. A variety of guides can be used to achieve the necessary accuracy or allowable moment needed for your application. CY is available in 9 bore sizes, from 6mm to 63mm with standard stokes up to 1000mm. The 5 different model variations offer widest application choice. Auto switches are integrated as standard.

The MSQ compact rotary table is ideal for material transfer applications. It incorporates load bearings and a mounting face with a rack-and-pinion style rotary actuator. The seven sizes are 10, 20, 30, 50 with rotational adjustments from 0-190 degrees, and auto switch capability. Additional features include a hollow shaft and direct load mounting possibility.

Series KQG2 is a one-touch fitting made of all stainless steel SUS316, except seal parts. The series is suitable for use with steam and is grease-free. Applicable tubing includes FEP, PFA, nylon, soft nylon, polyurethane and polyolefin. The KQG2 series is available in both metric and inch sizes. The KQG2 is more compact and lightweight, and offers more configuration variations and tube sizes than the KQG series.